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Area penerapan

Proses implant ion(ion implant), proses pengabuan(ashing), proses epi, proses pengendapan uap kimia(CVD), penyaring gas asam seperti HCl, HF, HBr, BCl3 dan lain-lain

Kekhususan produk

  • Appearance & Size : Pellet (ø=4.0, more)
  • Color : Brown
  • Bulk density : 0.6~0.7g/cc
  • Crush strength : > 4kgf/㎠
  • Upper temp. limit : < 100℃

Appearance

Mekanisme reaksi

Gas Mechanism TLV (ppm)
BCl3 BCl3 + 3MOH → 3MCl + B(OH)3 5
BCl3 + 3MO(OH) → 3MOCl + B(OH)
HBr 2HBr + M(OH)2 → MBr2+ 2H2O 3
HCl 3HCl + MO(OH) →MCl3 + 2H2O 5
HF 6HF + M2O3 → 2MF3 + 3H2O 3
SiH4 SiH4 + 2MOH →M2Si + 2H2O + H2 5
HANSO INC. Presiden Direktur (PIC) : Kim Sang Woong
Main Office/Research Institute: 149, Jukdong-ro, Youseong-gu, Daejeon, Republic of Korea, 34127
Factory: 18th-71, Munpyeongseo-ro, Daedeok-gu, Daejeon, Republic of Korea, 34302
TDP : 314-81-36819 TEL : 82-42-936-0991 FAX : 82-42-936-0994 E-mail : info@hansoinc.com
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