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Area penerapan

Proses implant ion(ion implant), proses pengabuan(ashing), proses epi, proses pengendapan uap kimia(CVD), penyaring gas SiH4 dan lain-lain

Kekhususan produk

  • Appearance & Size : Pellet (ø=3.0, more)
  • Color : Purple
  • Bulk density : 0.70~0.75g/cc
  • Crush strength : > 2.0kgf/㎠
  • Upper temp. limit : < 100℃

Appearance

Mekanisme reaksi

Gas Mechanism TLV (ppm)
SiH4 SiH4 + 2MOH → M2Si + 2H2O + H2 5
HANSO INC. Presiden Direktur (PIC) : Kim Sang Woong
Main Office/Research Institute: 149, Jukdong-ro, Youseong-gu, Daejeon, Republic of Korea, 34127
Factory: 18th-71, Munpyeongseo-ro, Daedeok-gu, Daejeon, Republic of Korea, 34302
TDP : 314-81-36819 TEL : 82-42-936-0991 FAX : 82-42-936-0994 E-mail : info@hansoinc.com
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